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博士論文

SOI(Si on Insulator)技術に関する研究

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SOI(Si on Insulator)技術に関する研究

Call No. (NDL)
UT51-95-T489
Bibliographic ID of National Diet Library
000000289013
Persistent ID (NDL)
info:ndljp/pid/3104500
Material type
博士論文
Author
有本由弘 [著]
Publisher
-
Publication date
-
Material Format
Paper・Digital
Capacity, size, etc.
-
Name of awarding university/degree
東京工業大学,博士 (工学)
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博士論文

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Table of Contents

Provided by：国立国会図書館デジタルコレクションLink to Help Page

  • 論文目録

  • 第一章 序論

    p1

  • 1.1 本研究の背景

    p1

  • 1.2 LSI開発における本研究の目的

    p2

  • 1.3 多層化技術としてのLSI

    p7

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Bibliographic Record

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Paper Digital

Material Type
博士論文
Title
SOI(Si on Insulator)技術に関する研究
Title Transcription
SOI (Si on Insulator) ギジュツ ニ カンスル ケンキュウ
Author/Editor
有本由弘 [著]
Author Heading
有本, 由弘 アリモト, ヨシヒロ ( 00907864 )Authorities
Degree grantor/type
東京工業大学
Date Granted
平成6年4月30日
Date Granted (W3CDTF)
1994
Dissertation Number
乙第2619号
Degree Type
博士 (工学)