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博士論文

Quarter-micrometer aluminum interconnection technologies for ultra-large scale integrated circuits

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Quarter-micrometer aluminum interconnection technologies for ultra-large scale integrated circuits

Call No. (NDL)
UT51-95-T502
Bibliographic ID of National Diet Library
000000289026
Persistent ID (NDL)
info:ndljp/pid/3083651
Material type
博士論文
Author
吉川公麿 [著]
Publisher
-
Date granted
平成6年5月31日
Material Format
Paper・Digital
Capacity, size, etc.
-
Degree grantor and degree
東京工業大学,博士 (工学)
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博士論文

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Table of Contents

Provided by：国立国会図書館デジタルコレクション

  • 論文目録

  • TABLE OF CONTENTS

    p5

  • Abstract

    p1

  • Acknowledgements

    p3

  • Table of Contents

    p5

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Bibliographic Record

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Paper Digital

Material Type
博士論文
Title
Quarter-micrometer aluminum interconnection technologies for ultra-large scale integrated circuits
Author/Editor
吉川公麿 [著]
Author Heading
吉川, 公麿 キッカワ, タカマロ
Alternative Title
超LSI用微細アルミニウム配線の高信頼化技術の研究 チョウLSIヨウ ビサイ アルミニウム ハイセン ノ コウシンライカ ギジュツ ノ ケンキュウ
Degree Grantor
東京工業大学
Date Granted
平成6年5月31日
Date Granted (W3CDTF)
1994
Dissertation Number
乙第2632号
Degree Type
博士 (工学)