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博士論文

Development and application of compact electron cyclotron resonance plasma sources

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Development and application of compact electron cyclotron resonance plasma sources

Call No. (NDL)
UT51-96-Y92
Bibliographic ID of National Diet Library
000000304602
Persistent ID (NDL)
info:ndljp/pid/3119412
Material type
博士論文
Author
Patrick J. O'Keeffe [著]
Publisher
-
Date granted
平成8年9月24日
Material Format
Paper・Digital
Capacity, size, etc.
-
Degree grantor and degree
埼玉大学,博士 (工学)
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博士論文

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Table of Contents

Provided by：国立国会図書館デジタルコレクション

  • Contents

    p3

  • Abstract

    p6

  • Acknowledgments

    p9

  • List of Symbols

    p11

  • List of Abbreviations

    p12

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Bibliographic Record

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Paper Digital

Material Type
博士論文
Title
Development and application of compact electron cyclotron resonance plasma sources
Author/Editor
Patrick J. O'Keeffe [著]
Author Heading
Patrick J. O'Keeffe パトリック オキーフ
Alternative Title
コンパクトECRプラズマソースの開発とその応用 コンパクト ECR プラズマ ソース ノ カイハツ ト ソノ オウヨウ
Degree Grantor
埼玉大学
Date Granted
平成8年9月24日
Date Granted (W3CDTF)
1996
Dissertation Number
甲第159号
Degree Type
博士 (工学)