活性種フラックス制御プロセスの開発

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活性種フラックス制御プロセスの開発

Call No. (NDL): UT51-97-Q433
Bibliographic ID of National Diet Library: 000000312602
Persistent ID (NDL): info:ndljp/pid/3127411

Material type: 博士論文

Author: 辻直人 [著]

Publisher: -

Publication date: -

Material Format: Paper・Digital

Capacity, size, etc.: -

Name of awarding university/degree: 東京大学,博士 (工学)

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Note (General)：: 博士論文

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Table of Contents

目次
第1章序論
p1
1.1 本論文の背景
p1
1.2 本論文の目的と構成
p2
第2章 Hot-wire CVD法によるSi膜作成プロセスの開発
p3

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Paper Digital

Material Type: 博士論文
Title: 活性種フラックス制御プロセスの開発
Title Transcription: カッセイシュフラックスセイギョプロセスノカイハツ
Author/Editor: 辻直人 [著]
Author Heading: 辻, 直人ツジ, ナオト
Degree grantor/type: 東京大学
Date Granted: 平成8年3月29日
Date Granted (W3CDTF): 1996
Dissertation Number: 甲第11873号
Degree Type: 博士 (工学)
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
NDLC: UT51
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-97-Q433
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000000312602
http://id.ndl.go.jp/bib/000000312602
Bibliographic Record Category (NDL): 213