Development of scanning probe microscopy for dimensional metrology
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Abstract
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TABLE OF CONTENTS
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Chapter I.Introduction
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1.1.Industrial requirements for dimensional metrology
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1.2.Comparison of various instruments for dimensional metrology
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Bibliographic Record
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- Material Type
- 博士論文
- Author/Editor
- 藤井透 [著]
- Author Heading
- 藤井, 透 フジイ, トオル
- Alternative Title
- 形状計測用走査プローブ顕微鏡の開発 ケイジョウ ケイソクヨウ ソウサ プローブ ケンビキョウ ノ カイハツ
- Degree grantor/type
- 東京大学
- Date Granted
- 平成7年4月14日
- Date Granted (W3CDTF)
- 1995
- Dissertation Number
- 乙第12277号
- Degree Type
- 博士 (工学)