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博士論文

Development of scanning probe microscopy for dimensional metrology

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Development of scanning probe microscopy for dimensional metrology

Call No. (NDL)
UT51-97-R24
Bibliographic ID of National Diet Library
000000312881
Persistent ID (NDL)
info:ndljp/pid/3127690
Material type
博士論文
Author
藤井透 [著]
Publisher
-
Publication date
-
Material Format
Paper・Digital
Capacity, size, etc.
-
Name of awarding university/degree
東京大学,博士 (工学)
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博士論文

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Table of Contents

Provided by：国立国会図書館デジタルコレクションLink to Help Page

  • Abstract

    p4

  • TABLE OF CONTENTS

    p6

  • Chapter I.Introduction

    p1

  • 1.1.Industrial requirements for dimensional metrology

    p2

  • 1.2.Comparison of various instruments for dimensional metrology

    p5

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Bibliographic Record

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Paper Digital

Material Type
博士論文
Title
Development of scanning probe microscopy for dimensional metrology
Author/Editor
藤井透 [著]
Author Heading
藤井, 透 フジイ, トオル
Alternative Title
形状計測用走査プローブ顕微鏡の開発 ケイジョウ ケイソクヨウ ソウサ プローブ ケンビキョウ ノ カイハツ
Degree grantor/type
東京大学
Date Granted
平成7年4月14日
Date Granted (W3CDTF)
1995
Dissertation Number
乙第12277号
Degree Type
博士 (工学)