博士論文

微細MOSFETの製造技術とデバイス特性の研究

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微細MOSFETの製造技術とデバイス特性の研究

Call No. (NDL)
UT51-98-J385
Bibliographic ID of National Diet Library
000000321904
Persistent ID (NDL)
info:ndljp/pid/3136713
Material type
博士論文
Author
小林敏夫 [著]
Publisher
-
Publication date
-
Material Format
Paper・Digital
Capacity, size, etc.
-
Name of awarding university/degree
早稲田大学,博士 (工学)
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博士論文

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Table of Contents

  • 目次

  • 第1章 序論

    p1

  • 1-1 研究の背景

    p1

  • 1-2 本研究の位置づけ

    p2

  • 1-3 論文の構成

    p6

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Bibliographic Record

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Paper Digital

Material Type
博士論文
Title
微細MOSFETの製造技術とデバイス特性の研究
Title Transcription
ビサイ MOSFET ノ セイゾウ ギジュツ ト デバイス トクセイ ノ ケンキュウ
Author/Editor
小林敏夫 [著]
Author Heading
小林, 敏夫 コバヤシ, トシオ
Degree grantor/type
早稲田大学
Date Granted
平成9年6月19日
Date Granted (W3CDTF)
1997
Dissertation Number
乙第1294号
Degree Type
博士 (工学)