Studies on oscillation mechanism of discharge-pumped ArF excimer laser with laser diagnostic techniques
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Table of Contents
Contents
1.Introduction
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1.1 Discharge-Pumped ArF Excimer Lasers
p1
1.2 Progress of the Studies for the Oscillation Mechanism of the Discharge-Pumped ArF Excimer Lasers
p3
1.3 Purpose and Composition of This Thesis
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- Material Type
- 博士論文
- Author/Editor
- 永井伸治 [著]
- Author Heading
- 永井, 伸治 ナガイ, シンジ
- Alternative Title
- レーザ診断技術を用いた放電励起ArFエキシマレーザの発振機構に関する研究 レーザ シンダン ギジュツ オ モチイタ ホウデン レイキ ArF エキシマ レーザ ノ ハッシン キコウ ニ カンスル ケンキュウ
- Degree grantor/type
- 名古屋大学
- Date Granted
- 平成10年3月25日
- Date Granted (W3CDTF)
- 1998
- Dissertation Number
- 甲第4057号
- Degree Type
- 博士 (工学)