イオンスパッタ加工の加工特性に関する研究

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イオンスパッタ加工の加工特性に関する研究

Call No. (NDL): UT51-98-V148
Bibliographic ID of National Diet Library: 000000327904
Persistent ID (NDL): info:ndljp/pid/3142715

Material type: 博士論文

Author: 井上徳之 [著]

Publisher: -

Publication date: -

Material Format: Paper・Digital

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Name of awarding university/degree: 総合研究大学院大学,博士 (工学)

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Note (General)：: 博士論文

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Table of Contents

Provided by：国立国会図書館デジタルコレクション

目次
第1章序論
p1
1･1 緒言
p1
1･2 研究の歴史
p2
1･3 本研究の目的と成果
p5

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Paper Digital

Material Type: 博士論文
Title: イオンスパッタ加工の加工特性に関する研究
Title Transcription: イオンスパッタカコウノカコウトクセイニカンスルケンキュウ
Author/Editor: 井上徳之 [著]
Author Heading: 井上, 徳之イノウエ, ノリユキ
Degree grantor/type: 総合研究大学院大学
Date Granted: 平成9年3月24日
Date Granted (W3CDTF): 1997
Dissertation Number: 乙第37号
Degree Type: 博士 (工学)
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
NDLC: UT51
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-98-V148
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000000327904
http://id.ndl.go.jp/bib/000000327904
Bibliographic Record Category (NDL): 213