博士論文

Study on the physical properties of semiconductor by spectroscopic ellipsometry

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Study on the physical properties of semiconductor by spectroscopic ellipsometry

Call No. (NDL)
UT51-98-Z201
Bibliographic ID of National Diet Library
000000330285
Persistent ID (NDL)
info:ndljp/pid/3145093
Material type
博士論文
Author
兪国林 [著]
Publisher
-
Publication date
-
Material Format
Paper・Digital
Capacity, size, etc.
-
Name of awarding university/degree
名古屋工業大学,博士 (工学)
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博士論文

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Table of Contents

  • Contents

    p1

  • 1 Introduction

    p1

  • 1.1 Background

    p1

  • 1.2 Organization of dissertation

    p5

  • Reference

    p7

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Bibliographic Record

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Paper Digital

Material Type
博士論文
Title
Study on the physical properties of semiconductor by spectroscopic ellipsometry
Author/Editor
兪国林 [著]
Author Heading
兪, 国林 ユ, コクリン
Alternative Title
分光エリプソメトリーによる半導体物性の研究 ブンコウ エリプソメトリー ニ ヨル ハンドウタイ ブッセイ ノ ケンキュウ
Degree grantor/type
名古屋工業大学
Date Granted
平成10年9月2日
Date Granted (W3CDTF)
1998
Dissertation Number
乙第136号
Degree Type
博士 (工学)