博士論文

マイクロマシン作製プロセスに関する研究

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マイクロマシン作製プロセスに関する研究

Call No. (NDL)
UT51-2001-B534
Bibliographic ID of National Diet Library
000000396091
Persistent ID (NDL)
info:ndljp/pid/3179408
Material type
博士論文
Author
松永崇 [著]
Publisher
[松永崇]
Publication date
2001
Material Format
Paper・Digital
Capacity, size, etc.
1冊
Name of awarding university/degree
大阪府立大学,博士 (工学)
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博士論文

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Table of Contents

  • 目次

    p1

  • 第1章 緒言

    p1

  • 参考文献

    p5

  • 第2章 マイクロシステムの物理

    p7

  • 2.1 スケール効果

    p7

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Bibliographic Record

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Paper Digital

Material Type
博士論文
Title
マイクロマシン作製プロセスに関する研究
Title Transcription
マイクロマシン サクセイ プロセス ニ カンスル ケンキュウ
Author/Editor
松永崇 [著]
Author Heading
松永, 崇 マツナガ, タカシ
Publication, Distribution, etc.
[松永崇]
Publication Date
2001
Publication Date (W3CDTF)
2001
Extent
1冊
Degree grantor/type
大阪府立大学