赤外散乱トモグラフィによるシリコン単結晶の評価技術
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国立国会図書館デジタルコレクション
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Table of Contents
目次
p1
1.始めに
p3
2.赤外散乱トモグラフィ (Infrared light scattering tomography:IR-LST)技術
p6
2.1 赤外線散乱トモグラフィによる欠陥観察
p6
2.2 散乱光強度の補止とノイズ除去
p13
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- Material Type
- 博士論文
- Title Transcription
- セキガイ サンラン トモグラフィ ニ ヨル シリコン タンケッショウ ノ ヒョウカ ギジュツ
- Author/Editor
- 南郷脩史 [著]
- Author Heading
- 南郷, 脩史 ナンゴウ, ノブヒト
- Publication, Distribution, etc.
- Publication Date
- [2001]
- Publication Date (W3CDTF)
- 2001
- Extent
- 2冊
- Degree grantor/type
- 学習院大学