A study of Si/SiO2 interfacial properties for ULSI fabrication
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Table of Contents
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論文目録
Contents
p2
1 Si-SiO₂ Systems and Si/SiO₂ Interfaces in ULSI
p5
1-1. Background
p6
1-2. Objective
p9
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Bibliographic Record
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- Material Type
- 博士論文
- Author/Editor
- 土明正勝 [著]
- Author Heading
- 土明, 正勝 ツチアキ, マサカツ
- Publication, Distribution, etc.
- Publication Date
- [2001]
- Publication Date (W3CDTF)
- 2001
- Extent
- 1冊
- Alternative Title
- 大規模集積化回路製造に関わるSi/SiO2界面特性の研究 ダイキボ シュウセキカ カイロ セイゾウ ニ カカワル Si
- Degree grantor/type
- 東京工業大学