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半導体プロセス材料実務便覧

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半導体プロセス材料実務便覧

Call No. (NDL)
ND371-156
Bibliographic ID of National Diet Library
000001639201
Persistent ID (NDL)
info:ndljp/pid/12599133
Material type
図書
Author
原徹, 柏木正弘 編集
Publisher
サイエンスフォーラム
Publication date
1983.4
Material Format
Paper・Digital
Capacity, size, etc.
468p ; 31cm
NDC
549.8
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Paper Digital

Material Type
図書
Title Transcription
ハンドウタイ プロセス ザイリョウ ジツム ベンラン
Author/Editor
原徹, 柏木正弘 編集
Author Heading
原, 徹, 1934- ハラ, トオル, 1934- ( 00129322 )Authorities
柏木, 正弘 カシワギ, マサヒロ ( 00137237 )Authorities
Publication, Distribution, etc.
Publication Date
1983.4
Publication Date (W3CDTF)
1983
Extent
468p
Size
31cm