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図書

スパッタ技術

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スパッタ技術

Call No. (NDL)
ND371-E20
Bibliographic ID of National Diet Library
000001923929
Persistent ID (NDL)
info:ndljp/pid/13650267
Material type
図書
Author
和佐清孝, 早川茂 著
Publisher
共立出版
Publication date
1988.6
Material Format
Paper・Digital
Capacity, size, etc.
227p ; 22cm
NDC
549.8
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Detailed bibliographic record

Summary, etc.:

著者の豊富な経験をもとに、スパッタの基礎から応用に至る技術について、セラミックス高温超電導体の薄膜化などの最新の具体例をあげて解説。(Provided by: 出版情報登録センター(JPRO))

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Table of Contents

Provided by:出版情報登録センター(JPRO)Link to Help Page
  • 1章 序章

  • 2章 スパッタの基礎

  • 3章 スパッタ装置と基本特性

  • 4章 スパッタによる薄膜化

  • 5章 スパッタによる微細加工

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Bibliographic Record

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Paper Digital

Material Type
図書
ISBN
4-320-08477-2
Title Transcription
スパッタ ギジュツ
Author/Editor
和佐清孝, 早川茂 著
Author Heading
和佐, 清孝 ワサ, キヨタカ ( 00130622 )Authorities
早川, 茂, -2001 ハヤカワ, シゲル, -2001 ( 00009253 )Authorities
Publication, Distribution, etc.
Publication Date
1988.6
Publication Date (W3CDTF)
1988
Extent
227p