VLSI製造技術 : サブミクロン時代に向かう最先端MOS技術のすべて

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Material Type: 図書
ISBN: 4-8222-7055-6
Title: VLSI製造技術 : サブミクロン時代に向かう最先端MOS技術のすべて
Title Transcription: ヴイエルエスアイセイゾウギジュツ
Author/Editor: 徳山巍, 橋本哲一編著
Author Heading: 徳山, 巍, 1929- トクヤマ, タカシ, 1929- ( 00084832 )Authorities
橋本, 哲一, 1940- ハシモト, ノリカズ, 1940- ( 00159267 )Authorities
Publication, Distribution, etc.: 東京 : 日経BP社
Publication Date: 1989.1
Publication Date (W3CDTF): 1989
Extent: 325p
Size: 27cm
Place of Publication (Country Code): JP
Text Language Code: jpn
Subject Heading: 集積回路シュウセキカイロ ( 00572448 )Authorities
NDC 8th ed.: 549.7
NDLC: ND386
Target Audience: 一般
Note (Bibliography): 各章末: 参考文献
Price: 6800円 (税込)
Holding library: 国立国会図書館
Call No.: ND386-E63
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000001982571
http://id.ndl.go.jp/bib/000001982571
National Bibliography No. (JPNO): 89039207
Cataloging Rule: Nippon Cataloging Rules, Preliminary New Edition
Bibliographic Record Category (NDL): 111