図書

半導体工業用材料ガス安全ハンドブック

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半導体工業用材料ガス安全ハンドブック

Call No. (NDL)
ND371-E67
Bibliographic ID of National Diet Library
000002057890
Persistent ID (NDL)
info:ndljp/pid/13650419
Material type
図書
Author
安全工学協会 編
Publisher
安全工学協会
Publication date
1990.4
Material Format
Paper・Digital
Capacity, size, etc.
301p ; 22cm
NDC
549.8
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Table of Contents

  • 1. ガスの物性

  • 1. 三塩化ヒ素/ 4

  • 2. 五塩化ヒ素/ 7

  • 3. 三フッ化ヒ素/ 8

  • 4. 五フッ化ヒ素/ 11

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Paper Digital

Material Type
図書
Title Transcription
ハンドウタイ コウギョウヨウ ザイリョウ ガス アンゼン ハンドブック
Author/Editor
安全工学協会 編
Author Heading
安全工学協会 アンゼン コウガク キョウカイ ( 00276396 )Authorities
Publication, Distribution, etc.
Publication Date
1990.4
Publication Date (W3CDTF)
1990
Extent
301p
Size
22cm