半導体デバイス工程評価技術 : ライフタイム、DLTS評価を中心として

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Material Type: 図書
Title: 半導体デバイス工程評価技術 : ライフタイム、DLTS評価を中心として
Title Transcription: ハンドウタイデバイスコウテイヒョウカギジュツ
Author/Editor: 宇佐美晶, 徳田豊 [著]
Author Heading: 宇佐美, 晶, 1937-1995 ウサミ, アキラ, 1937-1995 ( 00114623 )Authorities
徳田, 豊, 1950- トクダ, ユタカ, 1950- ( 00207110 )Authorities
Publication, Distribution, etc.: 東京 : リアライズ社
Publication Date: 1990.9
Publication Date (W3CDTF): 1990
Extent: 628p
Size: 27cm
Place of Publication (Country Code): JP
Text Language Code: jpn
Subject Heading: 半導体ハンドウタイ ( 00562913 )Authorities
NDC 8th ed.: 549.8
NDLC: ND371
Target Audience: 一般
Note (Bibliography): 各章末: 参考文献
Price: 72100円 (税込)
Holding library: 国立国会図書館
Call No.: ND371-E83
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000002099465
http://id.ndl.go.jp/bib/000002099465
National Bibliography No. (JPNO): 91034100
Cataloging Rule: Nippon Cataloging Rules, Preliminary New Edition
Bibliographic Record Category (NDL): 111