ULSI製造装置実用便覧

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Material Type: 図書
Title: ULSI製造装置実用便覧
Title Transcription: ユーエルエスアイセイゾウソウチジツヨウベンラン
Author/Editor: 菅原活郎, 前田和夫編
Author Heading: 菅原, 活郎スガワラ, カツロウ ( 00218270 )Authorities
前田, 和夫, 1923- マエダ, カズオ, 1923- ( 00039268 )Authorities
Publication, Distribution, etc.: 東京 : サイエンスフォーラム
Publication Date: 1991.11
Publication Date (W3CDTF): 1991
Extent: 517p
Size: 31cm
Place of Publication (Country Code): JP
Text Language Code: jpn
Subject Heading: 集積回路シュウセキカイロ ( 00572448 )Authorities
NDC 8th ed.: 549.7
NDLC: ND386
Target Audience: 一般
Note (Bibliography): 各章末: 文献
Price: 70040円 (税込)
Holding library: 国立国会図書館
Call No.: ND386-E174
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000002168192
http://id.ndl.go.jp/bib/000002168192
National Bibliography No. (JPNO): 92030977
Cataloging Rule: Nippon Cataloging Rules, Preliminary New Edition
Bibliographic Record Category (NDL): 111