フッ素化学(Ultra clean technology series ; no.11)

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Material Type: 図書
ISBN: 4-947655-45-3
Title: フッ素化学
Title Transcription: フッソカガク
Author/Editor: UCS半導体基盤技術研究会編
Series Title: Ultra clean technology series ; no.11
Author Heading: 半導体基盤技術研究会ハンドウタイキバンギジュツケンキュウカイ ( 00264648 )Authorities
Publication, Distribution, etc.: 東京 : リアライズ社
Publication Date: 1991.8
Publication Date (W3CDTF): 1991
Extent: 260p
Size: 27cm
Place of Publication (Country Code): JP
Text Language Code: jpn
Subject Heading: 半導体ハンドウタイ ( 00562913 )Authorities
弗素フッソ ( 00563785 )Authorities
NDC 8th ed.: 549.8
NDLC: ND371
Target Audience: 一般
Note (General): 監修: 大見忠弘・新田雄久
Note (Bibliography): 各章末: 参考文献
Price: 25750円 (税込)
Holding library: 国立国会図書館
Call No.: ND371-E134
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000002232844
http://id.ndl.go.jp/bib/000002232844
National Bibliography No. (JPNO): 93025916
Cataloging Rule: Nippon Cataloging Rules, Preliminary New Edition
Bibliographic Record Category (NDL): 111