図書

超高純度ガスの科学 第2分冊(データ編) (Surface science technology series ; 2)

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超高純度ガスの科学. 第2分冊(データ編)(Surface science technology series ; 2)

Call No. (NDL)
ND371-E181
Bibliographic ID of National Diet Library
000002328903
Persistent ID (NDL)
info:ndljp/pid/13664391
Material type
図書
Author
UCS半導体基盤技術研究会 編
Publisher
リアライズ社
Publication date
1994.4
Material Format
Paper・Digital
Capacity, size, etc.
633, 15p ; 27cm
NDC
549.8
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Kinki

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Paper Digital

Material Type
図書
ISBN
4-947655-67-4
Title Transcription
チョウ コウジュンド ガス ノ カガク
Volume
第2分冊(データ編)
Author/Editor
UCS半導体基盤技術研究会 編
Author Heading
半導体基盤技術研究会 ハンドウタイ キバン ギジュツ ケンキュウカイ ( 00264648 )Authorities
Publication, Distribution, etc.
Publication Date
1994.4