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図書

シリコン結晶・ウェーハ技術の課題 : 大口径化,平坦化

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シリコン結晶・ウェーハ技術の課題 : 大口径化,平坦化

Call No. (NDL)
ND371-E190
Bibliographic ID of National Diet Library
000002331835
Persistent ID (NDL)
info:ndljp/pid/13649584
Material type
図書
Author
岸野正剛 編
Publisher
リアライズ社
Publication date
1994.1
Material Format
Paper・Digital
Capacity, size, etc.
346, 6p ; 27cm
NDC
549.8
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Paper Digital

Material Type
図書
ISBN
4-947655-65-8
Title
シリコン結晶・ウェーハ技術の課題 : 大口径化,平坦化
Title Transcription
シリコン ケッショウ ウェーハ ギジュツ ノ カダイ
Author/Editor
岸野正剛 編
Author Heading
岸野, 正剛, 1938- キシノ, セイゴウ, 1938- ( 00149113 )Authorities
Publication, Distribution, etc.
東京 : リアライズ社
Publication Date
1994.1
Publication Date (W3CDTF)
1994
Extent
346, 6p