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Table of Contents
目次
多層配線技術の展望ーデバイスの性能向上を維持するために、配線・インターコネクト技術に期待すること/ 1ー8
1． はじめに/ 1
2． MOSFET微細化の指針と、性能向上を阻害する要因の分析/ 1
3． MOSFETの寄生抵抗を低減するための電極配線技術/ 2
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Bibliographic Record
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- Material Type
- 図書
- ISBN
- 4-88903-115-4
- Title Transcription
- ハンドウタイ デバイスヨウ ノ デンキョク ハイセン ザイリョウ ノ キソ ト サイキン ノ シンポ
- Series Title
- Author Heading
- 日本金属学会 ニホン キンゾク ガッカイ ( 00256733 )Authorities
- Publication, Distribution, etc.
- Publication Date
- 1997.12
- Publication Date (W3CDTF)
- 1997
- Extent
- 107p