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図書

SOIの科学 (Surface science technology series ; no.4)

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SOIの科学

(Surface science technology series ; no.4)

Call No. (NDL)
ND386-G152
Bibliographic ID of National Diet Library
000002881267
Material type
図書
Author
UCS半導体基盤技術研究会 編ほか
Publisher
リアライズ社
Publication date
2000.4
Material Format
Paper
Capacity, size, etc.
361, 4p ; 27cm
NDC
549.7
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Table of Contents

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  • 目次

  • 第1章 序論

  • システムLSl時代の主役:SOl LSI/ 3

    大見忠弘

  • 第2章 基板作製技術

  • 第1節 SOI技術

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Paper

Material Type
図書
ISBN
4-89808-022-7
Title Transcription
SOI ノ カガク
Author/Editor
UCS半導体基盤技術研究会 編
大見忠弘, 新田雄久 監修
Author Heading
大見, 忠弘, 1939- オオミ, タダヒロ, 1939- ( 00406390 )Authorities
新田, 雄久 ニッタ, タカヒサ ( 00806755 )Authorities
半導体基盤技術研究会 ハンドウタイ キバン ギジュツ ケンキュウカイ ( 00264648 )Authorities
Publication, Distribution, etc.
Publication Date
2000.4
Publication Date (W3CDTF)
2000