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Table of Contents
目次
まえがき/ 1
第1章 序論
1.1 IT時代を支える超LSIデバイス/ 9
1.2 平坦化CMP技術登場の背景/ 12
Holdings of Libraries in Japan
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Please contact your local library for information on how to use materials or whether it is possible to request materials from the holding libraries.
Kanto
千葉県立西部図書館
Paper- Call No.:
- 5497/ 100/
- Book Registration Number:
- 1101724485
東京都立中央図書館
Paper- Call No.:
- 549.7-5012-2001
- Book Registration Number:
- 5002074521
神奈川県立川崎図書館
Paper- Call No.:
- 549.7-120
- Book Registration Number:
- 80873185
横浜市立図書館
Paper- Call No.:
- 549.7202
- Book Registration Number:
- 2040586205
Tokai/Hokuriku
福井県立図書館
Paper- Call No.:
- 549.7/シヨウ
- Book Registration Number:
- 1013661713
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Bibliographic Record
You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.
- Material Type
- 図書
- ISBN
- 4-7693-1190-7
- Title
- Title Transcription
- ショウセツ ハンドウタイ CMP ギジュツ
- Author/Editor
- 土肥俊郎 編著
- Author Heading
- 土肥, 俊郎, 1947- ドイ, トシロウ, 1947- ( 00413159 )Authorities
- Publication, Distribution, etc.
- Publication Date
- 2001.1
- Publication Date (W3CDTF)
- 2001
- Extent
- 362p