詳説半導体CMP技術

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Provided by：国立国会図書館

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Material Type: 図書
ISBN: 4-7693-1190-7
Title: 詳説半導体CMP技術
Title Transcription: ショウセツハンドウタイ CMP ギジュツ
Author/Editor: 土肥俊郎編著
Author Heading: 土肥, 俊郎, 1947- ドイ, トシロウ, 1947- ( 00413159 )Authorities
Publication, Distribution, etc.: 東京 : 工業調査会
Publication Date: 2001.1
Publication Date (W3CDTF): 2001
Extent: 362p
Size: 22cm
Place of Publication (Country Code): JP
Text Language Code: jpn
Subject Heading: 半導体ハンドウタイ ( 00562913 )Authorities
集積回路シュウセキカイロ ( 00572448 )Authorities
NDC 9th ed.: 549.7 : Electronic engineering
NDLC: ND386
Target Audience: 一般
Price: 3800円
Holding library: 国立国会図書館
Call No.: ND386-G180
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000002952788
http://id.ndl.go.jp/bib/000002952788
National Bibliography No. (JPNO): 20146222
Cataloging Rule: Nippon Cataloguing Rules 1987 Revised Edition
Bibliographic Record Category (NDL): 111