Handbook of advanced semiconductor technology and computer systems / edited by Guy Rabbat.

• Material Type: 図書
• ISBN: 0442276885
• Title: Handbook of advanced semiconductor technology and computer systems / edited by Guy Rabbat.
• Series Title: Van Nostrand Reinhold electrical/computer science and engineering series
• Author Heading: Rabbat, Guy.
• Publication, Distribution, etc.: New York : Van Nostrand Reinhold Co.
• Publication Date: c1988.
• Publication Date (W3CDTF): 1988
• Extent: xviii, 941 p. : ill. ; 24 cm.
• Place of Publication (Country Code): US
• Text Language Code: eng
• Subject Heading: 集積回路. Syusekikairo.; 電子計算機 (地理区分) Densikeisanki.; ディジタル計算機. Zizitarukeisanki.; Integrated circuits -- Design and construction.; Electronic digital computers -- Circuits -- Design and construction.
• LCC: TK7874
• DDC: 621.395
• NDLC: ND386
• Note (Bibliography): Includes bibliographies and index.
• Holding library: 国立国会図書館
• Call No.: ND386-A13
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 000003167481; http://id.ndl.go.jp/bib/000003167481
• LC Control Number: 87006228; https://lccn.loc.gov/87006228
• Bibliographic Record Category (NDL): 211

Table of Contents

Contents

Preface/ ix

1. Deposition for Microelectronics-Plasma Enhanced Chemical Vapor Deposition,/ 1

2. Etching-Applications and Trends of Dry Etching,/ 27

3. Oxidation Technology-The Application of High Pressure Oxidation to VLSI,/ 73