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Table of Contents
第1部 光マイクロマシン
1章 光スイッチ,ミラーアレイ,減衰器/ 1
1・1 GLV,MARSスイッチ,DMD応用スイッチなどオンオフMEMSスイッチ/ 4
1・2 RIEのみで作製したスイッチ/ 5
1・3 ファイバ,導波路駆動スイッチ/ 6
Holdings of Libraries in Japan
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Northern Japan
宮城県図書館
Paper- 549.95/2002.Y
- 1008198739
山形県立図書館
Paper- 549.95-サワ
- 105647926
Kanto
千葉県立中央図書館
Paper- 54995/ 28/
- 0105721710
東京都立中央図書館
Paper- 549.9-5055-2002
- 5006060462
神奈川県立川崎図書館
Paper- 535.8-19
- 80984560
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Bibliographic Record
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- Material Type
- 図書
- ISBN
- 4-274-03589-1
- Title
- Title Transcription
- ヒカリ マイクロマシン
- Author/Editor
- 澤田廉士, 羽根一博, 日暮栄治 共著
- Author Heading
- 澤田, 廉士 サワダ, レンシ ( 00901247 )Authorities羽根, 一博, 1955- ハネ, カズヒロ, 1955- ( 00901248 )Authorities日暮, 栄治 ヒグラシ, エイジ ( 00901250 )Authorities
- Publication, Distribution, etc.
- Publication Date
- 2002.11
- Publication Date (W3CDTF)
- 2002
- Extent
- 424p