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Table of Contents
"序論 半導体産業について(はじめに/半導体産業の経済的側面について/半導体産業の成長性/半導体の技術的トレンド/知的財産権/まとめ)
1章 集積回路の製造プロセス (集積回路のできるまで/CMOSS集積回路の製造工程)
2章 設計技術 (ロジックデバイス設計技術/メモリデバイス設計技術)
3章 MOS技術 (MOSの物理/MOSFET技術)
4章 プロセス技術 (リングラフィ技術/ドライエッチング技術/酸化技術/拡散技術/成膜技術/TCAD技術)
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- Material Type
- 図書
- ISBN
- 4-87259-074-0
- Title
- Title Transcription
- シユウセキ カイロ コウガク ガイロン
- Author/Editor
- 濱口智尋, 谷口研二 監修島亨, 有門経敏 著
- Author Heading
- 浜口, 智尋, 1937- ハマグチ, チヒロ, 1937- ( 00006690 )Authorities谷口, 研二, 1948- タニクチ, ケンジ, 1948- ( 00176969 )Authorities島, 亨, 1935- シマ, トオル, 1935- ( 00902047 )Authorities有門, 経敏, 1951- アリカド, ツネトシ, 1951- ( 00902049 )Authorities
- Publication, Distribution, etc.
- Publication Date
- 2002.4
- Publication Date (W3CDTF)
- 2002
- Extent
- 199p