図書

半導体および絶縁体へのイオン注入技術

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半導体および絶縁体へのイオン注入技術

Call No. (NDL)
ND371-H179
Bibliographic ID of National Diet Library
000009090526
Material type
図書
Author
大吉啓司 著
Publisher
アイピーシー
Publication date
2003.3
Material Format
Paper
Capacity, size, etc.
151p ; 27cm
NDC
549.8
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Table of Contents

  • 目次

  • 著者からのメッセージ(—科学技術に携わる全ての方々へ—)

  • まえがき

  • 第1章 序説/ 1

  • 1.1 イオン注入技術の概説/ 1

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Bibliographic Record

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Paper

Material Type
図書
ISBN
4-901493-32-9
Title Transcription
ハンドウタイ オヨビ ゼツエンタイ エノ イオン チュウニュウ ギジュツ
Author/Editor
大吉啓司 著
Author Heading
大吉, 啓司 オオヨシ, ケイジ ( 01102325 )Authorities
Publication, Distribution, etc.
Publication Date
2003.3
Publication Date (W3CDTF)
2003
Extent
151p