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Table of Contents
生産現場・開発現場において役立つ 薄膜作製技術 目次
第1章 基礎技術
第1節 真空と圧力
1. 真空とは/ 3
2. 圧力とは/ 4
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Bibliographic Record
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- Material Type
- 図書
- ISBN
- 4-89808-078-2
- Title Transcription
- セイサン ゲンバ カイハツ ゲンバ ニ オイテ ヤクダツ ハクマク サクセイ ギジュツ
- Author/Editor
- 日本真空協会スパッタリングおよびプラズマプロセス技術部会 編
- Author Heading
- 日本真空協会 ニホン シンクウ キョウカイ ( 00294657 )Authorities
- Publication, Distribution, etc.
- Publication Date
- 2006.11
- Publication Date (W3CDTF)
- 2006
- Extent
- 323, 9p