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Table of Contents
第1章 フォトマスク技術の基本
1.1 フォトマスクとは
1.2 リソグラフィ技術とフォトマスク
1.3 フォトマスクの基本
1.4 データ準備
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Kanto
埼玉県立久喜図書館
Paper- Call No.:
- 549.8-フオ
- Book Registration Number:
- 102410032
さいたま市立中央図書館
Paper- Call No.:
- 549.7 フオ
- Book Registration Number:
- 01101237624
千葉県立西部図書館
Paper- Call No.:
- 5497/ 127/
- Book Registration Number:
- 1102260030
相模原市立図書館
Paper- Book Registration Number:
- 29882933
Tokai-Hokuriku
名古屋市図書館
Paper- Call No.:
- 5497//
- Book Registration Number:
- 0235784691
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Bibliographic Record
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- Material Type
- 図書
- ISBN
- 978-4-501-32820-7
- Title
- Title Transcription
- フォトマスク : デンシ ブヒン セイゾウ ノ キカン ギジュツ
- Author/Editor
- 田邉功, 竹花洋一, 法元盛久 共著
- Author Heading
- 田辺, 功, 1937- タナベ, イサオ, 1937- ( 00534033 )Authorities竹花, 洋一 タケハナ, ヨウイチ ( 01092236 )Authorities法元, 盛久 ホウガ, モリヒサ ( 01092237 )Authorities
- Publication, Distribution, etc.
- Publication Date
- 2011.4
- Publication Date (W3CDTF)
- 2011
- Extent
- 323p