レジストプロセスの最適化テクニック : 微細化・トラブル解消のための工程別対策および材料技術

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Summary, etc.：: 微細化・高精度化のために、各プロセスをどうするか―ノウハウを掴もう！(Provided by: 出版情報登録センター（JPRO）)

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Provided by：国立国会図書館

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Material Type: 図書
ISBN: 978-4-904080-90-0
Title: レジストプロセスの最適化テクニック : 微細化・トラブル解消のための工程別対策および材料技術
Title Transcription: レジストプロセスノサイテキカテクニック : ビサイカトラブルカイショウノタメノコウテイベツタイサクオヨビザイリョウギジュツ
Author Heading: 情報機構ジョウホウキコウ ( 01171002 )Authorities
Publication, Distribution, etc.: 東京 : 情報機構
Publication Date: 2011.9
Publication Date (W3CDTF): 2011
Extent: 557p
Size: 27cm
Place of Publication (Country Code): JP
Text Language Code: jpn
Subject Heading: リソグラフィーリソグラフィー ( 00576369 )Authorities
NDC 9th ed.: 549.7 : Electronic engineering
NDLC: ND386
NDC (Introduction of Reference Books): 549.51
Target Audience: 一般
Price: 69000円
Holding library: 国立国会図書館
Call No.: ND386-J148
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000011284277
http://id.ndl.go.jp/bib/000011284277
National Bibliography No. (JPNO): 21993334
Cataloging Rule: Nippon Cataloguing Rules 1987 Revised Edition
Bibliographic Record Category (NDL): 111