異種機能デバイス集積化技術の基礎と応用 : MEMS, NEMS, センサ, CMOSLSIの融合 (新材料・新素材シリーズ)
異種機能デバイス集積化技術の基礎と応用 = Integration technology for heterogeneous advanced devices : MEMS, NEMS, センサ, CMOSLSIの融合
(新材料・新素材シリーズ)
- Call No. (NDL)
- ND386-L1
- Bibliographic ID of National Diet Library
- 024050878
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Table of Contents
目次
〔第1編〕 総論編
第1章 最先端集積システムの技術とその応用
1 はじめに/ 15
2 ワイヤレス機器の集積化MEMS/ 3
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Kanto
神奈川県立川崎図書館
Paper- Call No.：
- 549.7-235
- Book Registration Number：
- 81548844
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Bibliographic Record
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- Material Type
- 図書
- ISBN
- 978-4-7813-0586-8
- Title Transcription
- イシュ キノウ デバイス シュウセキカ ギジュツ ノ キソ ト オウヨウ : MEMS, NEMS, センサ, CMOSLSI ノ ユウゴウ
- Author/Editor
- 益一哉, 年吉洋, 町田克之 監修
- Series Title
- Author Heading
- 益, 一哉, 1954- マス, カズヤ, 1954- ( 001124168 )Authorities年吉, 洋 トシヨシ, ヒロシ ( 001124169 )Authorities町田, 克之 マチダ, カツユキ ( 001124170 )Authorities
- Publication, Distribution, etc.
- Publication Date
- 2012.11
- Publication Date (W3CDTF)
- 2012