レジスト材料・プロセスの使い方ノウハウとトラブル解決

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Provided by：国立国会図書館

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Material Type: 図書
ISBN: 978-4-905507-25-3
Title: レジスト材料・プロセスの使い方ノウハウとトラブル解決
Title Transcription: レジストザイリョウ・プロセスノツカイカタノウハウトトラブルカイケツ
Author/Editor: 河合晃著
Author Heading: 河合, 晃カワイ, アキラ ( 01226447 )Authorities
Publication, Distribution, etc.: 東京 : R&D支援センター
Publication Date: 2018.3
Publication Date (W3CDTF): 2018
Extent: 185p
Size: 26cm
Place of Publication (Country Code): JP
Text Language Code: jpn
Subject Heading: 感光性樹脂カンコウセイジュシ ( 00576718 )Authorities
リソグラフィーリソグラフィー ( 00576369 )Authorities
NDC 10th ed.: 578.4 : Polymers. Plastics. Cellulose
NDLC: PA441
NDC (Introduction of Reference Books): 578.4
Target Audience: 一般
Note (Bibliography): 文献あり
Price: 45000円
Holding library: 国立国会図書館
Call No.: PA441-L160
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 029102830
http://id.ndl.go.jp/bib/029102830
National Bibliography No. (JPNO): 23097514
Cataloging Rule: Nippon Cataloguing Rules 1987 Revised Edition
Bibliographic Record Category (NDL): 111