図書

ナノインプリント技術ハンドブック

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ナノインプリント技術ハンドブック = Nanoimprint Technology Handbook

Call No. (NDL)
YU7-M480
Bibliographic ID of National Diet Library
030087888
Material type
図書
Author
応用物理学会・ナノインプリント技術研究会 編
Publisher
オーム社
Publication date
2019.11
Material Format
Paper
Capacity, size, etc.
781p ; 27cm
NDC
549.8
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Notes on use

Accompanying material:

CD-ROM(1枚 12cm)

Detailed bibliographic record

Summary, etc.:

ナノインプリントの基礎とともに、現状で最新のナノインプリント装置と関連部材、多様なデバイス応用についてわかりやすく執筆。(Provided by: 出版情報登録センター(JPRO))

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  • Tokyo Tech Research Repository

    Paper
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Paper

Material Type
図書
ISBN
978-4-274-22448-5
Title Transcription
ナノインプリント ギジュツ ハンドブック
Author/Editor
応用物理学会・ナノインプリント技術研究会 編
Author Heading
応用物理学会 オウヨウ ブツリ ガッカイ ( 00281497 )Authorities
Publication, Distribution, etc.
Publication Date
2019.11
Publication Date (W3CDTF)
2019
Extent
781p