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図書

フォトレジストの最先端技術 (エレクトロニクスシリーズ)

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フォトレジストの最先端技術 = Leading edge technologies of photoresist

(エレクトロニクスシリーズ)

Call No. (NDL)
PA441-M131
Bibliographic ID of National Diet Library
032396046
Material type
図書
Author
遠藤政孝 監修
Publisher
シーエムシー出版
Publication date
2022.9
Material Format
Paper
Capacity, size, etc.
345 p ; 26 cm
NDC
578.4
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Detailed bibliographic record

Summary, etc.:

IoTや5Gの社会実装に伴い研究が進むフォトレジストとリソグラフィ技術をまとめた一冊。ロードマップや材料開発,EUVレジストなどの先端技術,解析・評価,塗布・露光・現像・光源装置に関する情報を網羅。(Provided by: 出版情報登録センター(JPRO))

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Table of Contents

Provided by:国立国会図書館Link to Help Page
  • 目次

  • 【第Ⅰ編 ロードマップとリソグラフィ・フォトレジストの基礎】

  • 第1章 半導体ロードマップと今後の展開

    笹子勝

  • 1 緒言/ 2

  • 2 半導体デバイスのトレンドと課題/ 4

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Paper

Material Type
図書
ISBN
978-4-7813-1679-6
Title Transcription
フォトレジスト ノ サイセンタン ギジュツ
Author/Editor
遠藤政孝 監修
Author Heading
監修者 : 遠藤, 政孝 エンドウ, マサユキ ( 032487698 )Authorities
Publication, Distribution, etc.
Publication Date
2022.9
Publication Date (W3CDTF)
2022