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図書

ナノ加工技術ハンドブック

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ナノ加工技術ハンドブック = Handbook of nanofabrication

Call No. (NDL)
M21-R51
Bibliographic ID of National Diet Library
034419785
Material type
図書
Author
ナノ加工技術ハンドブック編集委員会 編
Publisher
大阪公立大学出版会
Publication date
2025.11
Material Format
Paper
Capacity, size, etc.
457 p ; 26 cm
NDC
500
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Detailed bibliographic record

Summary, etc.:

様々な物質をナノサイズに加工する「ナノ加工技術」は,先端半導体,光デバイス,バイオデバイス,量子デバイス等の動作原理に関わるナノテクノロジーを具現化し、産業化するために必要不可欠な技術です.その方法は,光,電子線,イオン線,X 線など広義の放射線を利用するものや,化学反応を利用することにより,分子,...

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Table of Contents

Provided by:出版情報登録センター(JPRO)Link to Help Page
  • 1章 微細加工技術

  • 2章 ナノ加工の基礎(プロセス科学と装置)

  • 3章 ナノ構造形成技術

  • 4章 ナノ構造評価・計測

  • 5章 ナノ加工のデバイス応用

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Paper

Material Type
図書
ISBN
978-4-909933-97-3
Title Transcription
ナノ カコウ ギジュツ ハンドブック
Author/Editor
ナノ加工技術ハンドブック編集委員会 編
Publication, Distribution, etc.
Publication Date
2025.11
Publication Date (W3CDTF)
2025
Extent
457 p
Size
26 cm