Characteristics of rf-produced, high-density plasma with very small diameter
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DOI[10.7566/JPSCP.1.015022]to the data of the same series
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- Material Type
- 記事
- Author/Editor
- Toshiki NakagawaShunjiro ShinoharaDaisuke Kuwahara
- Publication, Distribution, etc.
- Publication Date
- 2014-03-26
- Publication Date (W3CDTF)
- 2014-03-26
- Periodical title
- JPS conference proceedings
- No. or year of volume/issue
- (1)
- Volume
- (1)
- Text Language Code
- eng
- DOI
- 10.7566/JPSCP.1.015022
- Persistent ID (NDL)
- info:ndljp/pid/10266511
- Collection
- Collection (Materials For Handicapped People:1)
- Collection (particular)
- 国立国会図書館デジタルコレクション > 電子書籍・電子雑誌 > 学術機関 > 学協会
- Acquisition Basis
- オンライン資料収集制度
- Date Accepted (W3CDTF)
- 2017-01-23T21:10:24+09:00
- Date Captured (W3CDTF)
- 2017-01-23
- Format (IMT)
- application/pdf
- Access Restrictions
- 国立国会図書館内限定公開
- Service for the Digitized Contents Transmission Service
- 図書館・個人送信対象外
- Availability of remote photoduplication service
- 可
- Periodical Title (URI)
- Periodical Title (Persistent ID (NDL))
- info:ndljp/pid/10228855
- Data Provider (Database)
- 国立国会図書館 : 国立国会図書館デジタルコレクション