工業用イオン源

• Material Type: 記事
• Title: 工業用イオン源
• Author/Editor: 作道,訓之
• Publication, Distribution, etc.: 日本 : プラズマ・核融合学会
• Publication Date: 1994-04-25
• Publication Date (W3CDTF): 1994-04-25
• Alternative Title: Ion Sources for Industrial Use
• Periodical title: プラズマ・核融合学会誌
• No. or year of volume/issue: 70(4)
• Volume: 70(4)
• Pages: 313-322
• Text Language Code: JPN
• Alias of Author: SAKUDO,Noriyuki
• Subject Heading: ion source; ion implantation; surface modification; hot-filament type ion source; microwave ion source; metal vapor vacuum arc; sputter source
• Note (General): 著者所属: 金沢工業大学; Affiliation: Kanazawa Institute of Technology
• Persistent ID (NDL): info:ndljp/pid/10451703; https://dl.ndl.go.jp/pid/10451703
• Collection: 障害者向け資料
• Collection (Materials For Handicapped People:1): テキストデータ
• Collection (particular): 国立国会図書館デジタルコレクション > 電子書籍・電子雑誌 > 学術機関 > 学協会; https://dl.ndl.go.jp/collections/B00043
• Acquisition Basis: NII-ELS
• Available (W3CDTF): 2017-08-23
• Date Accepted (W3CDTF): 2017-08-15
• Date Captured (W3CDTF): 2017-08-15
• Format (IMT): application/pdf
• Access Restrictions: インターネット公開
• Availability of remote photoduplication service: 不可
• Periodical Title (Persistent ID (NDL)): info:ndljp/pid/10388776; https://dl.ndl.go.jp/pid/10388776
• Data Provider (Database): 国立国会図書館 : 国立国会図書館デジタルコレクション; https://dl.ndl.go.jp

• Summary, etc.: Industrial applications of ion beams began in the 1970's with their application in fabrication of semiconductor devices. Since then, various improveme...