Observation of the Electric Field Structure in the Sheath of Electronegative Plasmas by Laser-Induced Fluorescence-Dip Spectroscopy

• Material Type: 記事
• Title: Observation of the Electric Field Structure in the Sheath of Electronegative Plasmas by Laser-Induced Fluorescence-Dip Spectroscopy
• Author/Editor: 滝澤,一樹; 佐々木,浩一
• Publication, Distribution, etc.: 日本 : プラズマ・核融合学会
• Publication Date: 2004-01-25
• Publication Date (W3CDTF): 2004-01-25
• Periodical title: プラズマ・核融合学会誌
• No. or year of volume/issue: 80(1)
• Volume: 80(1)
• Pages: 3-4
• Text Language Code: ENG
• Alias of Author: TAKIZAWA,Kazuki; SASAKI,Koichi
• Subject Heading: sheath; electric field; electronegative plasmas; laser-induced fluorescence-dip spectroscopy
• Note (General): 著者所属: Department of Electronics, Nagoya University
• Persistent ID (NDL): info:ndljp/pid/10455298; https://dl.ndl.go.jp/pid/10455298
• Collection: 障害者向け資料
• Collection (Materials For Handicapped People:1): テキストデータ
• Collection (particular): 国立国会図書館デジタルコレクション > 電子書籍・電子雑誌 > 学術機関 > 学協会; https://dl.ndl.go.jp/collections/B00043
• Acquisition Basis: NII-ELS
• Available (W3CDTF): 2017-08-23
• Date Accepted (W3CDTF): 2017-08-15
• Date Captured (W3CDTF): 2017-08-15
• Format (IMT): application/pdf
• Access Restrictions: インターネット公開
• Availability of remote photoduplication service: 不可
• Periodical Title (Persistent ID (NDL)): info:ndljp/pid/10388874; https://dl.ndl.go.jp/pid/10388874
• Data Provider (Database): 国立国会図書館 : 国立国会図書館デジタルコレクション; https://dl.ndl.go.jp

• Summary, etc.: We have measured the distribution of the electric field in the sheath formed between electronegative Ar/SF_6 plasmas and a biased electrode by laser-i...