23pB07 2nd Harmonic ECRによる低気圧マイクロプラズマの特性(プラズマ基礎II, (社) プラズマ・核融合学会第21回年会)
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- Material Type
- 記事
- Author/Editor
- 藤山,寛井上,弘之黒木,大輔古江,陽光松田,良信篠原,正典
- Publication, Distribution, etc.
- Publication Date
- 2004-11-20
- Publication Date (W3CDTF)
- 2004-11-20
- Alternative Title
- 23pB07 Characteristics of Low-pressure Micro Plasmas using the 2^<nd> Harmonic ECR
- Periodical title
- プラズマ・核融合学会年会予稿集
- No. or year of volume/issue
- (21)
- Volume
- (21)