低抵抗シリコン基板を用いたポーラスシリコンの作製
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国立国会図書館デジタルコレクション
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- Material Type
- 記事
- Author/Editor
- 大向雅人青位祐輔藤澤宣弘
- Publication, Distribution, etc.
- Publication Date
- 2005-12
- Publication Date (W3CDTF)
- 2005-12
- Alternative Title
- Fabrication of porous silicon using low-resistivity silicon wafer
- Periodical title
- 明石工業高等専門学校研究紀要
- No. or year of volume/issue
- (48)
- Volume
- (48)