DCスパッタ装置の特性と銀薄膜の堆積
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国立国会図書館デジタルコレクション
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- Material Type
- 記事
- Title
- Author/Editor
- 大向雅人石田啓一堤保雄
- Publication, Distribution, etc.
- Publication Date
- 2010-12-24
- Publication Date (W3CDTF)
- 2010-12-24
- Alternative Title
- Characteristics of DC sputtering apparatus and deposition of Ag thin films
- Periodical title
- 明石工業高等専門学校研究紀要
- No. or year of volume/issue
- (53)
- Volume
- (53)