Development of Green NF3 : lowering the cost and environmental impact of NF3 through the use of additives

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Development of Green NF3 : lowering the cost and environmental impact of NF3 through the use of additives

Persistent ID (NDL): info:ndljp/pid/11057589

Material type: 記事

Author: Mitchell Glennほか

Publisher: 大陽日酸

Publication date: 2013-11-29

Material Format: Digital

Journal name: 大陽日酸技報 (32)

Publication Page: -

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Material Type: 記事
Title: Development of Green NF3 : lowering the cost and environmental impact of NF3 through the use of additives
Author/Editor: Mitchell Glenn
Subramanian Ramkumar
Wyse Carrie
Publication, Distribution, etc.: 日本 : 大陽日酸
Publication Date: 2013-11-29
Publication Date (W3CDTF): 2013-11-29
Alternative Title: Green NF3の開発 : 添加ガスによるコスト削減,環境負荷削減効果の検討
Periodical title: 大陽日酸技報
No. or year of volume/issue: (32)
Volume: (32)
Text Language Code: eng
Persistent ID (NDL): info:ndljp/pid/11057589
https://dl.ndl.go.jp/pid/11057589
Collection: 障害者向け資料
Collection (Materials For Handicapped People:1): テキストデータ
Collection (particular): 国立国会図書館デジタルコレクション > 電子書籍・電子雑誌 > その他
https://dl.ndl.go.jp/collections/B00035
Acquisition Basis: インターネット資料収集保存事業（WARP）
Date Accepted (W3CDTF): 2018-03-23T13:17:25+09:00
Date Captured (W3CDTF): 2013-12-16
Format (IMT): application/pdf
Access Restrictions: インターネット公開
Availability of remote photoduplication service: 不可
Periodical Title (URI): https://warp.da.ndl.go.jp/info:ndljp/pid/8387091/www.tn-sanso-giho.com/report32.html
Periodical Title (Persistent ID (NDL)): info:ndljp/pid/11057586
https://dl.ndl.go.jp/pid/11057586
Data Provider (Database): 国立国会図書館 : 国立国会図書館デジタルコレクション
https://dl.ndl.go.jp