Design of a MEMS SOI-Based High-Q Solenoid Inductor(Special Issue to the Asia-Pacific Symposium on Applied Electromagnetics and Mechanics (APSAEM06))

• Material Type: 記事
• Title: Design of a MEMS SOI-Based High-Q Solenoid Inductor(Special Issue to the Asia-Pacific Symposium on Applied Electromagnetics and Mechanics (APSAEM06))
• Title Transcription: Design of a MEMS SOI-Based High-Q Solenoid Inductor(Special Issue to the Asia-Pacific Symposium on Applied Electromagnetics and Mechanics (APSAEM06))
• Author/Editor: Varghese,M.; Hariz,A. J.
• Publication, Distribution, etc.: 日本 : 日本AEM学会
• Publication Date: 2007-09-10
• Publication Date (W3CDTF): 2007-09-10
• Periodical title: 日本AEM学会誌
• No. or year of volume/issue: 15(Supplement)
• Volume: 15(Supplement)
• Pages: S1-S4
• Text Language Code: ENG
• Subject Heading: Solenoid inductor; MicroElectroMechanical Systems (MEMS); Silicon on insulator (SOI); RF; Micromachining; EM simulation
• Note (General): 著者所属: School of Electrical and Information Engineering, University of South Australia
• Persistent ID (NDL): info:ndljp/pid/11148933; https://dl.ndl.go.jp/pid/11148933
• Collection: 障害者向け資料
• Collection (Materials For Handicapped People:1): テキストデータ
• Collection (particular): 国立国会図書館デジタルコレクション > 電子書籍・電子雑誌 > 学術機関 > 学協会; https://dl.ndl.go.jp/collections/B00043
• Acquisition Basis: NII-ELS
• Available (W3CDTF): 2018-09-12
• Date Accepted (W3CDTF): 2018-09-05
• Date Captured (W3CDTF): 2018-09-05
• Format (IMT): application/pdf
• Access Restrictions: インターネット公開
• Availability of remote photoduplication service: 不可
• Periodical Title (Persistent ID (NDL)): info:ndljp/pid/11151345; https://dl.ndl.go.jp/pid/11151345
• Data Provider (Database): 国立国会図書館 : 国立国会図書館デジタルコレクション; https://dl.ndl.go.jp

• Summary, etc.: We present a comparative study of various techniques for realising micro inductors on a chip using current silicon micro fabrication technologies. We ...