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博士論文

Mechanical Reliability Enhancement of Single Crystal Silicon Microstructures by Means of Diamond-Like Carbon Film Coating

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国立国会図書館デジタルコレクション

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DOI[10.14989/doctor.k21462]to the data of the same series

Mechanical Reliability Enhancement of Single Crystal Silicon Microstructures by Means of Diamond-Like Carbon Film Coating

Persistent ID (NDL)
info:ndljp/pid/11246293
Material type
博士論文
Author
Zhang, Wenlei
Publisher
-
Publication date
2019-01-23
Material Format
Digital
Capacity, size, etc.
-
Name of awarding university/degree
京都大学,博士(工学),Doctor of Philosophy (Engineering)
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Provided by：国立国会図書館デジタルコレクションLink to Help Page

  • 2021-05-20 再収集

  • 2021-05-20 再収集

  • 2023-09-04 再収集

  • 2023-09-04 再収集

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  • Kyoto University Research Information Repository

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Digital

Material Type
博士論文
Title
Mechanical Reliability Enhancement of Single Crystal Silicon Microstructures by Means of Diamond-Like Carbon Film Coating
Author/Editor
Zhang, Wenlei
Author Heading
Zhang, Wenlei
Publication Date
2019-01-23
Publication Date (W3CDTF)
2019-01-23
Alternative Title
ダイヤモンドライクカーボン膜の全面被覆による単結晶シリコン微細構造の機械的信頼性向上
Contributor
田畑, 修
鈴木, 基史
土屋, 智由
平方, 寛之
Degree grantor/type
京都大学
Date Granted
2019-01-23