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博士論文

Attempts toward Machining of the Back Surface of Si Substrate using Infrared Femtosecond Laser

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Attempts toward Machining of the Back Surface of Si Substrate using Infrared Femtosecond Laser

Persistent ID (NDL)
info:ndljp/pid/11551746
Material type
博士論文
Author
LUONG, PHU KHANH
Publisher
長岡技術科学大学
Publication date
2020-06-30
Material Format
Digital
Capacity, size, etc.
-
Name of awarding university/degree
国立大学法人長岡技術科学大学,博士（工学）
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Digital

Material Type
博士論文
Title
Attempts toward Machining of the Back Surface of Si Substrate using Infrared Femtosecond Laser
Author/Editor
LUONG, PHU KHANH
Publication, Distribution, etc.
長岡技術科学大学
Publication Date
2020-06-30
Publication Date (W3CDTF)
2020-06-30
Alternative Title
赤外フェムト秒レーザーによるSi基板裏面加工の試み
Contributor
教授（主査）　山田昇、教授　明田川正人、教授　磯部浩已、准教授　溝尻瑞枝、名誉教授　伊藤義郎
Degree grantor/type
国立大学法人長岡技術科学大学
Date Granted
2020-06-30