異なる成膜方法,成膜条件で作製されたDLC膜の膜密度と膜硬度,ラマンスペクトルの関係
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- Material Type
- 記事
- Author/Editor
- 堀内崇弘吉田健太郎加納眞
- Publication, Distribution, etc.
- Alternative Title
- Relationship between mass density and hardness, Raman spectrum of DLC films deposited by different coating methods and conditions
- Periodical title
- 研究報告
- No. or year of volume/issue
- 2011(17)
- Volume
- 2011(17)
- Text Language Code
- jpn
- Persistent ID (NDL)
- info:ndljp/pid/11615785