大気圧プラズマCVD法で作製した非晶質炭素膜による酸素透過率低減
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- Material Type
- 記事
- Author/Editor
- 渡邊敏行畔栁智栄子平子智章
- Publication, Distribution, etc.
- Alternative Title
- Amorphous carbon films deposited by atmospheric-pressure plasma chemical vapor deposition for reduction of oxygen transmission ratio
- Periodical title
- 研究報告
- No. or year of volume/issue
- 2012(18)
- Volume
- 2012(18)
- Text Language Code
- jpn
- Persistent ID (NDL)
- info:ndljp/pid/11615808