X線反射率及びX線光電子分光法による多層膜構造分析
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- Material Type
- 記事
- Author/Editor
- 福岡修杉本貴紀野本豊和
- Publication, Distribution, etc.
- Publication Date
- 2016
- Publication Date (W3CDTF)
- 2016
- Alternative Title
- Analysis of the multilayer film by X-ray reflectivity and X-ray photoelectron spectroscopy
- Periodical title
- あいち産業科学技術総合センター研究報告
- No. or year of volume/issue
- 2016
- Volume
- 2016