電子顕微鏡用アパーチャーの微細孔加工技術の開発 : モリブデン箔の電解エッチング加工
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- Material Type
- 記事
- Author/Editor
- 出口貴久外舘公生
- Publication, Distribution, etc.
- Publication Date
- 2009
- Publication Date (W3CDTF)
- 2009
- Alternative Title
- Development of microscopic hole machining technique for aperture of SEM : electrolytic etching machining of molybdenum foil
- Periodical title
- 埼玉県産業技術総合センター研究報告
- No. or year of volume/issue
- 平成20年度(7)
- Volume
- 平成20年度(7)